JPH0237338U - - Google Patents
Info
- Publication number
- JPH0237338U JPH0237338U JP11630188U JP11630188U JPH0237338U JP H0237338 U JPH0237338 U JP H0237338U JP 11630188 U JP11630188 U JP 11630188U JP 11630188 U JP11630188 U JP 11630188U JP H0237338 U JPH0237338 U JP H0237338U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- vacuum chamber
- component
- mirror
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005855 radiation Effects 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Radiation Pyrometers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11630188U JPH0237338U (en]) | 1988-09-02 | 1988-09-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11630188U JPH0237338U (en]) | 1988-09-02 | 1988-09-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0237338U true JPH0237338U (en]) | 1990-03-12 |
Family
ID=31358715
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11630188U Pending JPH0237338U (en]) | 1988-09-02 | 1988-09-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0237338U (en]) |
-
1988
- 1988-09-02 JP JP11630188U patent/JPH0237338U/ja active Pending
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